Large-diameter imaging SIMS using RAE detectors
SIMS: Secondary Ion Mass Spectrometry
Imaging SIMS is effective for obtaining spatial distribution information of hydrogen and impurities at ppm levels. By using a RAE (Resistive Anode Encoder) detector for projection-type imaging SIMS, it is possible to obtain distribution images with a larger diameter and deeper regions compared to the commonly used scanning methods in imaging analysis.
- 企業：一般財団法人材料科学技術振興財団 MST
- 価格：Other
